Damascene-patterned optical anisotropy in integrated photonics

We propose, simulate and experimentally demonstrate a method for realizing spatially-mapped birefringence onto integrated photonic devices and circuits. The fabrication method is based on applying a damascene-like process to dielectric film stacks to form anisotropic optical waveguides. An integrated polarizing beam-splitter (PBS) is realized with unprecedented performance: a record 0.52 octaves of fractional bandwidth (116 THz), maximum on-chip insertion loss of 1.4 ± 0.8 dB, and a minimum extinction ratio of 16 ± 3 dB, pushing it into the realm of wideband spectroscopy and imaging applications. Additionally, photonic structures such as polarization-selective beam-taps and polarizationselective microring resonators are demonstrated. © 2017 Optical Society of America under the terms of the OSA Open Access Publishing Agreement OCIS codes: (130.5440) Polarization-selective devices; (130.3120) Integrated optics devices; (130.3060) Infrared. References and links 1. R. Nagarajan, J. Rahn, M. Kato, J. Pleumeekers, D. Lambert, V. Lal, H. S. Tsai, A. Nilsson, A. Dentai, M. Kuntz, R. Malendevich, J. Tang, J. Zhang, T. Butrie, M. Raburn, B. Little, W. Chen, G. Goldfarb, V. Dominic, B. Taylor, M. Reffle, F. Kish, and D. Welch, “10 Channel, 45.6 Gb/s per channel, polarization-multiplexed DQPSK, InP receiver photonic integrated circuit,” J. Lightwave Technol. 29(4), 386–395 (2011). 2. D. Huang, E. A. Swanson, C. P. Lin, J. S. Schuman, W. G. Stinson, W. Chang, M. R. Hee, T. Flotte, K. Gregory, C. A. Puliafito, and J. G. Fujimoto, “Optical coherence tomography,” Science 254(5035), 1178–1181 (1991). 3. Z. Wang, H.-C. Lee, D. Vermeulen, L. Chen, T. Nielsen, S. Y. Park, A. Ghaemi, E. Swanson, C. Doerr, and J. Fujimoto, “Silicon photonic integrated circuit swept-source optical coherence tomography receiver with dual polarization, dual balanced, in-phase and quadrature detection,” Biomed. Opt. Express 6(7), 2562–2574 (2015). 4. Z. Wang, B. Potsaid, L. Chen, C. Doerr, H.-C. Lee, T. Nielson, V. Jayaraman, A. E. Cable, E. Swanson, and J. G. Fujimoto, “Cubic meter volume optical coherence tomography,” Optica 3(12), 1496–1503 (2016). 5. J. S. Tyo, D. L. Goldstein, D. B. Chenault, and J. A. Shaw, “Review of passive imaging polarimetry for remote sensing applications,” Appl. Opt. 45(22), 5453–5469 (2006). 6. S. Tan and R. M. Narayanan, “Design and performance of a multiwavelength airborne polarimetric lidar for vegetation remote sensing,” Appl. Opt. 43(11), 2360–2368 (2004). 7. P. Goloub, M. Herman, H. Chepfer, J. Riedi, G. Brogniez, P. Couvert, and G. Séze, “Cloud thermodynamical phase classification from the POLDER spaceborne instrument,” J. Geophys. Res. Atmos. 105(D11), 14747– 14759 (2000). 8. D. Cornwell, “Space-based laser communications break threshold,” Opt. Photonics News 27(5), 24–31 (2016). 9. H. Wu, Y. Tan, and D. Dai, “Ultra-broadband high-performance polarizing beam splitter on silicon,” Opt. Express 25(6), 6069–6075 (2017). 10. Z. Su, E. Timurdogan, E. S. Hosseini, J. Sun, G. Leake, D. D. Coolbaugh, and M. R. Watts, “Four-port integrated polarizing beam splitter,” Opt. Lett. 39(4), 965–968 (2014). 11. D. Dai and H. Wu, “Realization of a compact polarization splitter-rotator on silicon,” Opt. Lett. 41(10), 2346– 2349 (2016). 12. B. Little, “Integrated optics polarization beam splitter using form birefringence,” U.S. patent US20060120657 A1 (2006). 13. X. Sun, J. S. Aitchison, and M. Mojahedi, “Realization of an ultra-compact polarization beam splitter using asymmetric MMI based on silicon nitride / silicon-on-insulator platform,” Opt. Express 25(7), 8296–8305 (2017). 14. Y. Shani, C. H. Henry, R. C. Kistler, R. F. Kazarinov, and K. J. Orlowsky, “Integrated optic adiabatic polarization splitter on silicon,” Appl. Phys. Lett. 56(2), 120–121 (1990). Vol. 25, No. 26 | 25 Dec 2017 | OPTICS EXPRESS 33664 #305443 https://doi.org/10.1364/OE.25.033664 Journal © 2017 Received 23 Aug 2017; revised 20 Dec 2017; accepted 21 Dec 2017; published 22 Dec 2017 15. D. Dai, J. Bauters, and J. E. Bowers, “Passive technologies for future large-scale photonic integrated circuits on silicon: polarization handling, light non-reciprocity and loss reduction,” Light Sci. Appl. 1(3), e1 (2012). 16. E. Kapon, “Polarizing optical waveguides,” U.S. patent US4869569 A (1989). 17. Y. Suzuki, H. Iwamura, and O. Mikami, “TE/TM mode selective channel waveguides in GaAs/AlAs superlattice fabricated by SiO2 cap disordering,” Appl. Phys. Lett. 56(1), 19–20 (1990). 18. Y. Suzuki, H. Iwamura, T. Miyazawa, and O. Mikami, “A novel waveguided polarization mode splitter using refractive index changes induced by superlattice disordering,” IEEE J. Quantum Electron. 30(8), 1794–1800 (1994). 19. O. Watanabe, M. Tsuchimori, A. Okada, and H. Ito, “Mode selective polymer channel waveguide defined by the photoinduced change in birefringence,” Appl. Phys. Lett. 71(6), 750–752 (1997). 20. M.-C. Oh, M.-H. Lee, and H.-J. Lee, “Polymeric waveguide polarization splitter with a buried birefringent polymer,” IEEE Photonics Technol. Lett. 11(9), 1144–1146 (1999). 21. S. R. Forrest, F. F. So, and D. Y. Zang, “Polarization-selective integrated optoelectronic devices incorporating crystalline organic thin films,” U.S. patent US5172385 A (1992). 22. R. Sun, J. Cheng, J. Michel, and L. Kimerling, “Transparent amorphous silicon channel waveguides and high-Q resonators using a damascene process,” Opt. Lett. 34(15), 2378–2380 (2009). 23. M. H. P. Pfeiffer, A. Kordts, V. Brasch, M. Zervas, M. Geiselmann, J. D. Jost, and T. J. Kippenberg, “Photonic damascene process for integrated high-Q microresonator based nonlinear photonics,” Optica 3(1), 20–25 (2016). 24. M. Born and E. Wolf, Principles of Optics: Electromagnetic Theory of Propagation, Interference and Diffraction of Light, (Elsevier, 1980). 25. S. Jahani and Z. Jacob, “Transparent subdiffraction optics: nanoscale light confinement without metal,” Optica 1(2), 96 (2014). 26. R.-C. Tyan, A. A. Salvekar, H.-P. Chou, C.-C. Cheng, A. Scherer, P.-C. Sun, F. Xu, and Y. Fainman, “Design, fabrication, and characterization of form-birefringent multilayer polarizing beam splitter,” J. Opt. Soc. Am. A